Multi-Photon 3D Microfabrication
Multi-photon three-dimensional microfabrication (3DM) is a photolithographic technique
that enables topologically complex 3D micro-structures with feature size as
small as 1 μm or less to be generated in a single exposure step by nonlinear
photo-patterning in a material. The photo-patterning is initiated by
coherent multi-photon excitation (MPE). The material may be a glass, a
polymerizable resin, or even a heterogeneous composite, such as a resin
containing dispersed nano-particles. 3DM offers great promise as a
tool for generating complex micro-devices, such as MEMS, micro-fluidics, and
micro-optical components. The publication below provides a comprehensive
review of the 3DM technique.
S. M. Kuebler and M. Rumi, "Nonlinear optics -- applications: three-dimensional microfabrication," in
Encyclopedia of Modern Optics, R. D. Guenther, D. G. Steel, L. Bayvel, Eds. Elsevier:
Oxford, 2004, pp. 189-206.
Sequence of steps involved in the generation of a free-standing microstructure by multi-photon 3DM.
The NPM group is developing new material systems for 3DM and applying the
technique to create a wide range of functional micro-structures. Of particular interest are micro-structures that
perform a photonic function, interact with or sense biological species,
or mimic a biological function. The limiting resolution, or the dimensions of the smallest
feature that can be generated, is determined by the optical parameters of
the excitation geometry and the physical and chemical response of the
material to MPE. We are exploring new optical configurations to
improve the resolution in 3DM. Examples of Dr. Kuebler's
work in 3DM can be found in the publications below.
"An efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication"
W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder
Science, 296, 1106-1109 (2002)
"Optimizing two-photon initiators and exposure conditions for three-dimensional lithographic microfabrication"
S.M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry,
J. Photopolym. Sci. Technol., 14, 657-668 (2001)
"Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication"
B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, Lee, I. -Y. S., McCord-Maughon,
D. J. Qin, H. R. Roeckel, M. Rumi, Wu, X. -L. S. R. Marder, and J. W. Perry.
Nature, 398, 51-54 (1999)
Opto-mechanical setup for multi-photon 3DM.
